Micro-Tec MTC-5 Multiple Target Graticule Calibration Standards
Micro-Tec individual graticule calibration standards
EM-Tec SEM stub adapters
Micro-Tec MTC-5 Multiple Target Graticule Calibration Standards
combines calibration and imaging quality assessment in a single standard
Introduction
31-T33600 Micro-Tec MTC-5 Multiple target
calibration standard with 4 patterns, Bright Field
view magnification of this image, with details
The new and innovative Micro-Tec MTC-5 multiple target graticule calibration standards have been designed using an ultra-flat conductive silicon substrate with corrosion resistant Chromium lines. The precise patterns are manufactured utilizing the latest semiconductor manufacturing techniques. The Micro-Tec multi target graticules provide bright and rich contrast images for ease of calibration. Intended for use with reflective light imaging, optical quality control systems and low magnification SEM imaging for:
- magnification calibration
- critical dimension measurements
- distortion correction
- imaging quality assessment
- quality control measurements.
There are four distinct patterns on the MTC-5 calibration standard:
- Circle patterns from 5µm to 5mm diameter
- Square patterns from 5 x 5µm to 5x5mm
- Hexagon patterns from 5µm to 5mm across
- Cross scale pattern of 5x5mm with 0.002mm divisions
The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns.
Each of the calibration standards has a unique product ID serial number etched on the die. The Micro-Tec MTC-5 calibration standards are NIST traceable; a wafer level certificate of traceability is supplied with each standard. We offer:
- MTC-5 with Cr lines on silicon for bright field imaging
| Substrate | 525µm thick boron doped ultra-flat wafer with <100> orientation |
| Conductive | Excellent; 5-10 Ohm resistivity |
| Patterns | Circles, squares, hexagons, cross scale |
| Pattern size | 5 x 5mm (4x) |
| Lines | 75nm thick, pure bright Chromium lines/features (measure center to center) 1µm wide lines 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95 and 100µm apart5µm wide lines spaced 125 and 150µm apart 10µm wide lines, spaced 200, 250, 300, 350, 400, 500, 600, 700, 800 and 900µm apart 20µm wide lines spaced 1.0, 1.5, 2, 2.5, 3, 3.5, 4, 4.5 and 5mm apart |
| Cross scale pattern |
5mm wide lines, 5 x 5mm with 0.002mm divisions |
| Die size | 12 x 12mm |
| Application | Reflective light, scanning electron microscopy, optical imaging systems |
| Identification | Product ID with serial number etched |
| Mounting | Unmounted, mounting optionally available |
| Supplied | Supplied in a Gel-Pak box |
Ordering Information for MTC-5 Multiple Target Graticule Calibration Standards
|
||||||||||||||||||||||||||||||||||||||||
