R D Mathis Micro-Electronic evaporation sources
compact, low power and efficient thermal evaporation sources
Introduction
The Micro-Electronic sources represent a full line of compact and efficient thermal evaporation sources which originate from the extensive selection of the R.D. Mathis standard size thermal evaporation sources. The overall length of the Micro-Electronics sources is less than 50mm, which makes them compatible with many smaller thermal vacuum evaporation systems. The Micro-Electronics line of evaporation sources includes baffled box sources, boats, filaments, crucible heaters and covered boat sources. They are suitable for evaporation of metals, alloys, and compounds. For all theses sources, the power requirements are published so it is easy to match them with the available power source. The smaller Micro-Electronics sources are ideal for:
- lower power systems
- systems with smaller vacuum chambers
- thin film processes that require small amounts of evaporant
- small amounts of expensive materials
- R & D and product development applications
- sample preparation applications
The material of choice for these sources is tungsten, but the evaporation boats are also available in tantalum and molybdenum
Ordering information for low power micro-electronics evaporation sources
*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
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| Micro-Electronics evaporation source ME1, Tungsten 0.005 Inch/0.127mm |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME1W |
Evaporation source 1.45 Volts, 266 Amps, 386 Watts, 1600⁰ C Temp, Approx. 2g, Tungsten |
|
| each |
€151,10
|
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|
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| Micro-Electronics evaporation source ME2, Tantalum 0.005 Inch/0.127mm |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME2Ta |
Evaporation source 2.52 Volts, 141 Amps, 355 Watts, 1600⁰ C Temp, 1.1 cm3, Tantalum |
|
| pkg/3 |
€96,40
|
| 71-ME2ATa |
Single hole cap for evaporation source ME2, Tantalum |
|
| pkg/3 |
€73,70
|
| 71-ME2BTa |
Multi hole cap for evaporation source ME2, Tantalum |
|
| pkg/3 |
€85,10
|
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|
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| Micro-Electronics evaporation source ME3, 0.005 inch/0.127mm |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME3W |
Evaporation source 2 Volts, 202 Amps, 404 Watts, 1800⁰ C Temp, 0.6 cm3, Tungsten |
|
| pkg/5 |
€46,60
|
| 71-ME3Ta |
Evaporation source 1.77 Volts, 138 Amps, 244 Watts, 1600⁰ C Temp, 0.1 cm3, Tantalum |
|
| pkg/5 |
€96,40
|
| 71-ME3Mo |
Evaporation source 0.94 Volts, 150 Amps, 141 Watts, 1400⁰ C Temp, 0.6 cm3, Molybdenum |
|
| pkg/5 |
€42,80
|
|
|
 |
| Micro-Electronics evaporation source ME4 |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME4W |
Evaporation source ME4 1.83 Volts, 143 Amps, 262 Watts, 1800⁰ C Temp, 0.1 cm3, Tungsten |
|
| pkg/5 |
€35,90
|
| 71-ME4Ta |
Evaporation source 1.5 Volts, 98 Amps, 147 Watts, 1600⁰ C Temp, 0.1 cm3, Tantalum |
|
| pkg/5 |
€69,90
|
| 71-ME4Mo |
Evaporation source 0.94 Volts, 93 Amps, 87 Watts, 1400⁰ C Temp, 0.1 cm3, Molybdenum |
|
| pkg/5 |
€32,10
|
|
|
 |
| Micro-Electronics evaporation source ME5 |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME5W |
Evaporation source 1.69 Volts, 80 Amps, 135 Watts, 1800⁰ C Temp, 0.033 cm3, Tungsten |
|
| pkg/5 |
€33,40
|
| 71-ME5Ta |
Evaporation source 1.4 Volts, 55 Amps, 77 Watts, 1600⁰ C Temp, 0.033 cm3, Tantalum |
|
| pkg/5 |
€59,90
|
| 71-ME5Mo |
Evaporation source 0.85 Volts, 58 Amps, 49 Watts, 1400⁰ C Temp, 0.033 cm3, Molybdenum |
|
| pkg/5 |
€27,70
|
|
|
 |
| Micro-Electronics evaporation source ME6A |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME6AW |
Evaporation source 1.83 Volts, 145 Amps, 265 Watts, 1800⁰ C Temp, 0.5 cm3, Tungsten |
|
| pkg/5 |
€39,70
|
| 71-ME6ATa |
Evaporation source 1.85 Volts, 95 Amps, 175 Watts, 1600⁰ C Temp, 0.5 cm3, Tantalum |
|
| pkg/5 |
€67,40
|
| 71-ME6AMo |
Evaporation source 0.85 Volts, 102 Amps, 87 Watts, 1400⁰ C Temp, 0.5 cm3, Molybdenum |
|
| pkg/5 |
€34,00
|
|
|
 |
| Micro-Electronics evaporation source ME6B |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME6BW |
Evaporation source 1.88 Volts, 144 Amps, 271 Watts, 1800⁰ C Temp, 0.2 cm3, Tungsten |
|
| pkg/5 |
€39,70
|
| 71-ME6BTa |
Evaporation source 1.73 Volts, 96 Amps, 166 Watts, 1600⁰ C Temp, 0.2 cm3, Tantalum |
|
| pkg/5 |
€67,40
|
| 71-ME6BMo |
Evaporation source 0.9 Volts, 97 Amps, 87 Watts, 1400⁰ C Temp, 0.2 cm3, Molybdenum |
|
| pkg/5 |
€34,00
|
|
|
 |
| Micro-Electronics evaporation source ME7 |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME7W |
Evaporation source 2.03 Volts, 7 Amps, 154 Watts, 1800⁰ C Temp, 0.033 cm3, Tungsten |
|
| pkg/5 |
€30,90
|
| 71-ME7Ta |
Evaporation source 1.72 Volts, 49 Amps, 84 Watts, 1600⁰ C Temp, 0.33 cm3, Tantalum |
|
| pkg/5 |
€67,40
|
| 71-ME7Mo |
Evaporation source 1.12 Volts, 53 Amps, 59 Watts, 1400⁰ C Temp, 0.033 cm3, Molybdenum |
|
| pkg/5 |
€34,00
|
|
|
 |
| Micro-Electronics evaporation source ME8 |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME8W |
Evaporation source 2.57 Volts, 129 Amps, 332 Watts, 1800⁰ C Temp, 0.2 cm3, Tungsten |
|
| pkg/5 |
€42,80
|
| 71-ME8Ta |
Evaporation source 2.16 Volts, 93 Amps, 201 Watts, 1600⁰ C Temp, 0.2 cm3, Tantalum |
|
| pkg/5 |
€79,40
|
| 71-ME8Mo |
Evaporation source 1.04 Volts, 79 Amps, 82 Watts, 1400⁰ C Temp, 0.2 cm3, Molybdenum |
|
| pkg/5 |
€38,40
|
|
|
 |
| Micro-Electronics evaporation source ME9 |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME9W |
Evaporation source 1.55 Volts, 97 Amps, 150 Watts, 1800⁰ C Temp, 0.1 cm3, Tungsten |
|
| pkg/5 |
€47,90
|
| 71-ME9Ta |
Evaporation source 1.48 Volts, 67 Amps, 99 Watts, 1600⁰ C Temp, 0.1 cm3, Tantalum |
|
| pkg/5 |
€98,30
|
| 71-ME9Mo |
Evaporation source 0.8 Volts, 72 Amps, 58 Watts, 1400⁰ C Temp, 0.1 cm3, Molybdenum |
|
| pkg/5 |
€44,10
|
|
|
 |
| Micro-Electronics evaporation source ME10, Tantalum 0.005 Inch/0.127mm |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME10Ta |
Evaporation source 1.07 Volts, 131 Amps, 140 Watts, 1600⁰ C Temp, Tantalum |
|
| pkg/3 |
€124,70
|
|
|
 |
| Micro-Electronics evaporation filament source ME11, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME11W |
Evaporation filament 3.59 Volts, 25 Amps, 90 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/10 |
€41,60
|
| 71-ME11W3 |
Evaporation filament 3,13 Volts, 44 Amps, 138 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/10 |
€45,40
|
|
|
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| Micro-Electronics evaporation filament source ME12, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME12W |
Evaporation filament 2.47 Volts, 27 Amps, 67 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/10 |
€39,70
|
| 71-ME12W3 |
Evaporation filament 2.3 Volts, 47 Amps, 108 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/10 |
€41,60
|
|
|
 |
| Micro-Electronics evaporation filament source ME13A, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME13AW |
Evaporation filament 1.25 Volts, 33 Amps, 41 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/10 |
€39,70
|
| 71-ME13AW3 |
Evaporation filament 1.08 Volts, 61 Amps, 66 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/10 |
€41,60
|
|
|
 |
| Micro-Electronics evaporation filament source ME13B, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME13BW |
Evaporation filament 1.95 Volts, 27 Amps, 53 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/10 |
€43,50
|
| 71-ME13BW3 |
Evaporation filament 1.68 Volts, 52 Amps, 87 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/10 |
€45,40
|
|
|
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| Micro-Electronics evaporation filament source ME13C, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME13CW |
Evaporation filament 1.95 Volts, 26 Amps, 51 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/10 |
€45,40
|
| 71-ME13CW3 |
Evaporation filament 1.56 Volts, 53 Amps, 83 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/10 |
€47,30
|
|
|
 |
| Micro-Electronics evaporation filament source ME14, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME14W |
Evaporation filament 3.21 Volts, 24 Amps, 77 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/5 |
€46,30
|
| 71-ME14W3 |
Evaporation filament 2.9 Volts, 36 Amps, 104 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/5 |
€50,10
|
|
|
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| Micro-Electronics evaporation filament source ME15, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME15W |
Evaporation filament 4.18 Volts, 23 Amps, 96 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/5 |
€54,80
|
| 71-ME15W3 |
Evaporation filament 3.63 Volts, 34 Amps, 123 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/5 |
€57,60
|
|
|
 |
| Micro-Electronics evaporation filament source ME16A, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME16AW |
Evaporation filament 2.48 Volts, 23 Amps, 57 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/10 |
€41,60
|
| 71-ME16AW3 |
Evaporation filament 2.3 Volts, 39 Amps, 90 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/10 |
€43,50
|
|
|
 |
| Micro-Electronics evaporation filament source ME16B, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME16BW |
Evaporation filament 2.9 Volts, 23 Amps, 67 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/10 |
€43,50
|
| 71-ME16BW3 |
Evaporation filament 2.66 Volts, 42 Amps, 112 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/10 |
€45,40
|
|
|
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| Micro-Electronics evaporation filament source ME16C, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME16CW |
Evaporation filament 3.77 Volts, 23 Amps, 87 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/10 |
€43,50
|
| 71-ME16CW3 |
Evaporation filament 3.54 Volts, 43 Amps, 152 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/10 |
€45,40
|
|
|
 |
| Micro-Electronics evaporation filament source ME16D, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME16DW |
Evaporation filament 5.96 Volts, 21 Amps, 125 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/10 |
€47,30
|
| 71-ME16DW3 |
Evaporation filament 5.51 Volts, 40 Amps, 220 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/10 |
€54,80
|
|
|
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| Micro-Electronics evaporation filament source ME16E, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME16EW |
Evaporation filament 4.25 Volts, 32 Amps, 136 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/10 |
€45,40
|
| 71-ME16EW3 |
Evaporation filament 5.0 Volts, 44 Amps, 220 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/10 |
€47,30
|
|
|
 |
| Micro-Electronics evaporation filament source ME17, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME17W |
Evaporation filament 4,93 Volts, 22 Amps, 108 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/10 |
€66,20
|
| 71-ME17W3 |
Evaporation filament 4.57 Volts, 40 Amps, 183 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/10 |
€69,90
|
|
|
 |
| Micro-Electronics heating filament ME18A for crucible C1 , Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME18AW |
Heating filament for crucible C1, 6.56 Volts, 48 Amps, 315 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/10 |
€66,20
|
| 71-ME18AW3 |
Heating filament for crucible C1, 5.0 Volts, 55 Amps, 275 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.76mm |
|
| pkg/10 |
€72,50
|
|
|
 |
| Micro-Electronics heating filament ME18B for crucible C9 , Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME18BW |
Heating filament for crucible C9, 4.7 Volts, 43 Amps, 202 Watts, 1800⁰ C Temp, 1 x tungsten strand Ø0.76mm |
|
| pkg/10 |
€66,20
|
| 71-ME18BW3 |
Heating filament for crucible C9, 4.25 Volts, 56 Amps, 238 Watts, 1800⁰ C Temp, 3 x tungsten strand Ø0.64mm |
|
| pkg/10 |
€69,90
|
|
|
 |
| Micro-Electronics shielded crucible heater ME19 for crucibles C1 and C9, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME19W |
Shielded crucible heater for crucible C1 & C9, 1.26 Volts, 257 Amps, 324 Watts, 1600⁰ C Temp, Tungsten |
|
| each |
€132,30
|
|
|
 |
| Micro-Electronics shielded crucible heater ME20 for crucibles C10, Tungsten |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME20W |
Shielded crucible heater for crucble C10, 1.16 Volts, 169 Amps, 196 Watts, 1600⁰ C Temp, Tungsten |
|
| each |
€132,30
|
|
|
 |
| Micro-Electronics evaporation source ME21 |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME21W |
Evaporation source 1.96 Volts, 213 Amps, 417 Watts, 1800⁰ C Temp, 0.6 cm3, Tungsten |
|
| pkg/5 |
€54,80
|
| 71-ME21Ta |
Evaporation source 1.75 Volts, 141 Amps, 247 Watts, 1600⁰ C Temp, 0.6 cm3, Tantalum |
|
| pkg/5 |
€146,50
|
| 71-ME21Mo |
Evaporation source 0.94 Volts, 147 Amps, 138 Watts, 1400⁰ C Temp, 0.6 cm3, Molybdenum |
|
| pkg/5 |
€47,30
|
|
|
 |
| Micro-Electronics evaporation source ME22, Tantalum 0.005 Inch/0.127mm |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME22Ta |
Evaporation source ME22, 1.87 Volts, 196 Amps, 367 Watts, 1600⁰ C Temp, 2.5 cm3, Tantalum |
|
| each |
€54,80
|
| 71-ME22ATa |
Single hole cap for evaporation source ME22, Tantalum |
|
| each |
€41,60
|
| 71-ME22BTa |
Multi hole cap for evaporation source ME22, Tantalum |
|
| each |
€49,10
|
|
|
 |
| Micro-Electronics evaporation source ME23 |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME23W |
Evaporation source 1.4 Volts, 327 Amps, 458 Watts, 1800⁰ C Temp, 0.6 cm3, Tungsten |
|
| pkg/5 |
€97,00
|
| 71-ME23Ta |
Evaporation source 1.51 Volts, 215 Amps, 325 Watts, 1600⁰ C Temp, 0.6 cm3, Tantalum |
|
| pkg/5 |
€184,60
|
| 71-ME23Mo |
Evaporation source 0.79 Volts, 251 Amps, 198 Watts, 1400⁰ C Temp, 0.6 cm3, Molybdenum |
|
| pkg/5 |
€98,30
|
|
|
 |
| Micro-Electronics evaporation source ME24 |
| Product # |
Unit |
Price* |
Add to Quote / Order |
| 71-ME24W |
Evaporation source 1.66 Volts, 322 Amps, 535 Watts, 1800⁰ C Temp, 0.6 cm3, Tungsten |
|
| pkg/5 |
€99,50
|
| 71-ME24Ta |
Evaporation source 1.47 Volts, 230 Amps, 338 Watts, 1600⁰ C Temp, 0.6 cm3, Tantalum |
|
| pkg/5 |
€184,60
|
| 71-ME24Mo |
Evaporation source 0.83 Volts, 248 Amps, 206 Watts, 1400⁰ C Temp, 0.6 cm3, Molybdenum |
|
| pkg/5 |
€97,00
|
|
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