The folded baffled box evaporation sources are manufactured by folding the tantalum or molybdenum foil into an evaporation boat with separate baffle sheets and covers with holes. These folded baffled box sources are ideal for higher volumes of materials and can be used by themselves of with baffle and cover to reduce the amount of particles in the vapor stream. The baffled box source prevents materials from spitting onto the substrate. The folded baffled box evaporation sources are available in Tantalum and Molybdenum with different foil thickness (0.13 and 0.25mm). They are used as direct resistive heating sources for upwards evaporation, i.e. the substrates are mounted above the source.
Dimensions of the folded baffled box evaporation sources
P/N |
Bl |
W |
H |
OL |
P = Holes in cover |
Vol. |
Mat. |
Thickness |
44mm |
25mm |
19mm |
89mm |
60 x Ø1.5mm / 4 x 15 rows |
21cc |
Ta/Mo |
0.13/0.25mm |
|
44mm |
38mm |
25mm |
89mm |
60 x Ø1.5mm / 5 x 15 rows |
43cc |
Ta/Mo |
0.13/0.25mm |
|
76mm |
35mm |
19mm |
121mm |
115 x Ø1.5mm / 5 x 23 rows |
50cc |
Ta/Mo |
0.13/0.25mm |
|
70mm |
52mm |
32mm |
102mm |
65 x Ø3mm / 5 x 13 rows |
112cc |
Ta/Mo |
0.13/0.25mm |
The folded baffled box sources are suitable for:
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