EM-Tec Checkerboard Calibration Standard for SEM imaging
quick and easy full image magnification calibration

•                                                        
• EM-Tec Checkerboard Calibration Standard for SEM imaging
  • EM-Tec Checkerboard calibration standard

The EM-Tec Checkerboard calibration standard has been developed for quick and easy magnification and image calibration of SEMs and compact SEMs. It consists of over 1.6 million Squares which form 4 stages of checkerboard patterns. The smallest checkerboard is 10 x 10 um. These smallest checkerboards then form a pattern of 100 x 100 um and these again form checkerboards of 1 x 1 mm. The 1 x 1 mm checkerboards then form a 5 x 5 mm pattern.
The smallest 1 x 1 um squares are made with 20nm thick Chromium and 40nm Gold on the Cr, deposited on an ultra-flat conductive Boron doped <100> silicon substrate. These materials are deemed inert under normal working conditions. Imaging contrast is good for both SE and BSE imaging, especially at lower keV. The EM-Tec Checkerboard calibration sample is suitable for SEM magnification calibration in the range of 20x to 50,000x with a pitch accuracy of ± 0.1% in both X and Y direction. Also useful for checking of image distortions and the accuracy of (motorized) SEM stages.
The EM-Tec Checkerboard calibration standard is NIST traceable. Example of wafer level certificate of traceability which is supplied with each EM-Tec Checkerboard calibration standard.

Features of the EM-Tec Checkerboard Calibration standard

• Quick and easy magnification calibration and image check
• Feature sizes: 1mm, 100um, 10um and 1 um
• Pitch accuracy ± 0.1% in X and Y directions
• Ideal for SEM and compact SEM
• Excellent contrast with SE and BSE, also at lower KeV
• NIST traceable
• Large 5 x 5 mm checkerboard
• Die size is 6 x 6 mm with a thickness of 675 um
• Substrate B-doped <100> silicon with 5-10 ohm-cm resistivity
• Pattern made with 40nm Gold over 20nm thick Chrome
• Long life construction with virtually inert materials

The EM-Tec EDX-Checkerboard calibration standard is available unmounted and mounted on popular SEM stubs.

Bright Cr-squares of the 1um checker-board pattern in SE-image Line profile of SE signal intensity showing clear sharp edges of the 1 um squares

EM-Tec Checkerboard calibration standard Product # Unit Price* Add to Quote / Order 31-T37000-U EM-Tec Checkerboard calibration standard, unmounted Qty: each €585,00 31-T37000-1 EM-Tec Checkerboard calibration standard, mounted on a standard Ø12.7 mm pin stub Qty: each €595,00 31-T37000-2 EM-Tec Checkerboard calibration standard, mounted on a Zeiss Ø12.7 mm pin stub Qty: each €595,00 31-T37000-6 EM-Tec Checkerboard calibration standard, mounted on a Ø12.2 mm JEOL stub Qty: each €612,50 31-T37000-8 EM-Tec Checkerboard calibration standard, mounted on a Ø15 mm Hitachi M4 stub Qty: each €595,00